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Overview
General Description
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Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
A specialty electronics instruments designed specifically for the four point probe measurement. It features high accuracy, an excellent range, and many features which simplify the four point probing measurement.
Specifications
Sheet resistance range: 1 milliohm-per-square (10^-3) up to 5 x 10^8 ohms-per-square with 0.3% accuracy.
The volume resistivity range is from 1 milliohm-cm (10^-3) up to 10^6 ohms-cm
Sample Requirements and Preparation
Films, wafers, or any homogeneous and uniform thickness sample. For best accuracy with the 1mm spaced probe tips, diameter > 30mm and thickness < 0.6mm . Otherwise, corrections can be made to the measurements (see SOP or RM3-AR instructions below for details).
Standard Operating Procedure
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Questions & Troubleshooting
Process Library
References
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