Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name	Jandel 4-point Probe
iLab Kiosk
FIC
Owner	Neil Dilley
Location	J Bay
Max. Wafer
Internal Page
Staff Page

Overview

General Description

A specialty electronics instruments designed specifically for the four point probe measurement. It features high accuracy, an excellent range, and many features which simplify the four point probing measurement.

Specifications

Sheet resistance range: 1 milliohm-per-square (10^-3) up to 5 x 10^8 ohms-per-square with 0.3% accuracy.

The volume resistivity range is from 1 milliohm-cm (10^-3) up to 10^6 ohms-cm

Sample Requirements and Preparation

Films, wafers, or any homogeneous and uniform thickness sample. For best accuracy with the 1mm spaced probe tips, diameter > 30mm and thickness < 0.6mm . Otherwise, corrections can be made to the measurements (see SOP or RM3-AR instructions below for details).

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Jandel 4-point Probe