Jandel 4-point Probe

Owned by Neil Dilley
Last updated: Jun 28, 2022
1 min read




Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



iLab Name

Jandel 4-point Probe

iLab Kiosk


FIC


Owner

Neil Dilley

Location

J Bay

Max. Wafer


Internal Page
Staff Page

Overview

General Description

A specialty electronics instruments designed specifically for the four point probe measurement. It features high accuracy, an excellent range, and many features which simplify the four point probing measurement. 

Specifications

Sheet resistance range: 1 milliohm-per-square (10^-3) up to 5 x 10^8 ohms-per-square with 0.3% accuracy.

The volume resistivity range is from 1 milliohm-cm (10^-3) up to 10^6 ohms-cm

Sample Requirements and Preparation

Films, wafers, or any homogeneous and uniform thickness sample. For best accuracy with the 1mm spaced probe tips, diameter > 30mm and thickness < 0.6mm . Otherwise, corrections can be made to the measurements (see SOP or RM3-AR instructions below for details).


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References