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iLab Name:Cleanroom Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan Neil Dilley
Location: Cleanroom - Q Bay 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley SCS4200An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements
with an embedded PCto collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1
Features
- Low profile coaxial-driven style stage (optional large knob precision stage)
- Back-lash free movement
- Mounting for 12 micropositioners
- 4.5” Probe Card Holder compatible
- Micropositioner Standby Dock
- Microscope Tilting for E-Z lens switching
Applications
- Basic IV/CV
- RF, Single Broadband Probing
- High Voltage, High Current
Sample Requirements and Preparation