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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
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iLab Name: Cleanroom Probe Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Nithin RaghunathanNeil Dilley
Location: BRK 2261 J Bay
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
Probe Station I consists of a Micromanipulator 6000 Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of an two Keithley SCS4200 4200A-SCS Semiconductor Parameter Analyzer, Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the dataheated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.
Sample Requirements and Preparation
Questions & Troubleshooting
Process Library
References
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