iLab Name: Probe 2 
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan Neil Dilley
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm

Overview

General Description

An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Features

• Low profile coaxial-driven style stage (optional large knob precision stage)
• Back-lash free movement
• Mounting for 12 micropositioners
• 4.5” Probe Card Holder compatible
• Micropositioner Standby Dock
• Microscope Tilting for E-Z lens switching

Applications

• Basic IV/CV
• RF, Single Broadband Probing
• High Voltage, High Current

Probe Station I consists of a Micromanipulator 6000 probe station in a dark box on top of a vibration isolation table. Similar to semiconductor probe stations, this is utilized for the electrical testing of microfabricated devices.  There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

References

EB-6 Data sheet