iLab Name: Omicron
iLab Core:Metrology Core
FIC:
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size:
Overview
General Description
- High-Resolution Electron Energy Loss Spectrometer (HREELS)
- Ultra-High Vacuum Scanning Tunneling Microscope
- Hemispherical Electron Energy Analyzer for XPS
- Ar Sputtering and Heating in UHV
- Low Energy Electron Diffraction (LEED)
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References