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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Cleanroom Probe 2 
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley SCS4200 Semiconductor Parameter Analyzer for both IV and CV measurements with an embedded PC to collect the data.

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References

 

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