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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status
: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

 Vacuum cannot achieve to below -26 in Hg

Estimated Fix Date and Comment

 Vacuum pump needs to be repaired

Responding StaffJoon Park

SOP

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