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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Cleanroom Probe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: Nithin Raghunathan
Location: BRK 2261
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley SCS4200 Semiconductor Parameter Analyzer, an HP 4284A LCR meter. A Windows-NT PC running Labview is used to drive the instruments and collect the data.

Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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