iLab Name: Carbon Nanotube PECVD
FIC: Tim Fisher
Owner: Dave Lubelski
Location: brk2283
Maximum Wafer Size: 2"
Overview
General Description
Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
Specifications
Limited access, see PI.
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References