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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.

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iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: 

Overview

General Description

Imaging X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate with a lateral resolution of 5 μm. The technique can analyze any vacuum-compatible substrate. The AXIS ULTRA DLD incorporates quantitative, real-time parallel XPS imaging with high spatial resolution spectroscopy.

Specifications

The technique can analyze any vacuum-compatible substrate.

  • A Kratos charge neutralization system allows to work with non-conducting samples.
  • Magnetic immersion lens for efficient  photoelectron collection.
  • Spherical mirror analyzers  for high resolution (over spectrometer-sample resolution is <0.35 eV).
  • Monochromized Al and Ag anodes minimize a sample radioactive damage.
  • Concentric hemispherical analyzers combined with a DLD detector for real time XPS imaging.
  • Fast load lock with cryo/heating options, which can used for biological and organic samples.
  • A catalytic cell to facilitate substrate treatment and preparation (6 bar, 1000).
  • A glove box attached directly to the instrument to load/prepare a moisture– or air–sensitive samples.
  • A corronene gun for non-destructive depth profiling.

Technology Overview

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References

 

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