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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size: 

Overview

General Description

Imaging X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate with a lateral resolution of 5 μm. The technique can analyze any vacuum-compatible substrate. The AXIS ULTRA DLD incorporates quantitative, real-time parallel XPS imaging with high spatial resolution spectroscopy.

Specifications

The technique can analyze any vacuum-compatible substrate.

  • A Kratos charge neutralization system allows to work with non-conducting samples.
  • Magnetic immersion lens for efficient  photoelectron collection.
  • Spherical mirror analyzers  for high resolution (over spectrometer-sample resolution is <0.35 eV).
  • Monochromized Al and Ag anodes minimize a sample radioactive damage.
  • Concentric hemispherical analyzers combined with a DLD detector for real time XPS imaging.
  • Fast load lock with cryo/heating options, which can used for biological and organic samples.
  • A catalytic cell to facilitate substrate treatment and preparation (6 bar, 1000).
  • A glove box attached directly to the instrument to load/prepare a moisture– or air–sensitive samples.
  • A corronene gun for non-destructive depth profiling.

Technology Overview

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References

 

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