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H2S CVD Furnace

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Created by Hosler, Richard S, last modified on Dec 08, 2021

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Winter Shutdown from 22 Dec 2021 to 03 Jan 2022

Specialty furnace/RF power source combination.

SOP:

2D-CVD SOP (Aug 2020).pdf

iLabs Link:

H2S CVD Furnace

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