List of pages to be added:
- Edge bead Removal
- Pre-exposure bake
- Post-exposure bake
- Multilayer spins
- Characterization of spun films
- Etch resistance
EPFL MEMS and Nanofabrication edX Course: https://www.edx.org/course/micro-and-nanofabrication-mems
Stanford edX: https://www.edx.org/course/nano-stanford
Practical Microfabrication Youtube Channel from UofL MNTC: https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q
Introduction to Nanofabrication, Dr. Orad Reshef, University of Ottowa: http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf
MKS Instruments Handbook: (can be downloaded here; https://www.mksinst.com/mks-handbook).
ECE 695Q - Nanometer Scale Patterning and Processing: https://nanohub.org/resources/24028
Lithographic Processing Overview: ICs, Lithography, and Photoresist - Henderson Research Group, GA Tech
UC Berkeley:
- Equipment manual
Lithoclass: https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8
Evapclass: https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit
Etchclass: https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit
University Nanofabrication/Cleanroom resources:
- UPenn - Singh Center for Nanotechnology
- nanoFAB - University of Alberta
- CMI - EPFL
- University of Utah - Nanofab
- UC Irvine - INRF
- University of Louisville - Micro/Nano Technology Center
- RPI - Micro and Nano Fabrication Clean Room
- RIT - Semiconductor and Microsystems Fabrication Laboratory
Manufacturer resources:
Recommendations from LabNetwork:
- http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf
- https://www.nnci.net/educational-resources
- https://www.cnf.cornell.edu/education/nanocourses
Nanotech "Maker's Course" online, free, start any time: https://www.coursera.org/learn/nanotechnology
Youtube Resources:
"Silicon wafers": https://www.youtube.com/watch?v=vXk6Uhq74nU
(Answer - the left is <100>, the most common orientation we see in our lab. The right is <111>, which is just annoying!)
Making MEMS micro-gears:
Surface micromachinig: https://www.youtube.com/watch?v=nmw65l2HUjw
- bulk micromachining: https://www.youtube.com/watch?v=XCiYZd_ddKs
Individual process steps to accomplish the above (more in depth if you want to go there):
Full Process flow for a pressure sensor: https://www.youtube.com/watch?v=JhBmvnil66M
https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/course/