Processing

List of pages to be added:

1. Edge bead Removal

2. Pre-exposure bake

3. Post-exposure bake

4. Multilayer spins

5. Characterization of spun films

6. Etch resistance

EPFL MEMS and Nanofabrication edX Course: https://www.edx.org/course/micro-and-nanofabrication-mems

Stanford edX: https://www.edx.org/course/nano-stanford

Practical Microfabrication Youtube Channel from UofL MNTC: https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q

Introduction to Nanofabrication, Dr. Orad Reshef, University of Ottowa: http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf

MKS Instruments Handbook: (can be downloaded here; https://www.mksinst.com/mks-handbook).

ECE 695Q - Nanometer Scale Patterning and Processing: https://nanohub.org/resources/24028

Lithographic Processing Overview: ICs, Lithography, and Photoresist - Henderson Research Group, GA Tech

 UC Berkeley:

• Equipment manual

• Lithoclass: https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8

• Evapclass: https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit

• Etchclass: https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit

University Nanofabrication/Cleanroom resources:

• UPenn - Singh Center for Nanotechnology

• nanoFAB - University of Alberta

• CMI - EPFL

• University of Utah - Nanofab

• UC Irvine - INRF

• University of Louisville - Micro/Nano Technology Center

• RPI - Micro and Nano Fabrication Clean Room

• RIT - Semiconductor and Microsystems Fabrication Laboratory

Manufacturer resources:

• MircroChemicals - Application Notes

Recommendations from LabNetwork:

• http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf

• https://www.nnci.net/educational-resources

• https://www.cnf.cornell.edu/education/nanocourses

• Nanotech "Maker's Course" online, free, start any time: https://www.coursera.org/learn/nanotechnology

• Youtube Resources:

  • "Silicon wafers": https://www.youtube.com/watch?v=vXk6Uhq74nU

    • (Answer - the left is <100>, the most common orientation we see in our lab.  The right is <111>, which is just annoying!)

  • Making MEMS micro-gears: 

    • Surface micromachinig: https://www.youtube.com/watch?v=nmw65l2HUjw

    • bulk micromachining: https://www.youtube.com/watch?v=XCiYZd_ddKs

  • Individual process steps to accomplish the above (more in depth if you want to go there):

    • https://www.youtube.com/watch?v=1bxf9QRVesQ

    • https://www.youtube.com/watch?v=JJElLA8k6Qg

    • https://www.youtube.com/watch?v=ljbESGs1XrM

    • https://www.youtube.com/watch?v=UKf0offCyw0

    • https://www.youtube.com/watch?v=D9r0ZBNIq48

  • Full Process flow for a pressure sensor: https://www.youtube.com/watch?v=JhBmvnil66M

• https://people.rit.edu/lffeee/

• https://www.nnci.net/technical-resources

• https://www.nnci.net/working-groups

• https://courses.edx.org/courses/course-v1:StanfordOnline+ENGRX0001+1T2020/course/

• https://snfexfab.stanford.edu/

• https://snsf.stanford.edu/

General Semiconductor Education

• How to Build a $20 Billion Semiconductor Fab

• Semiconductor Fabrication 101