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Overview

General Description

A vacuum probe station for DC, RF, and optic fiber probing from low temperatures (4.5 K) up to 350 K. Uses a cryocooler to eliminate the need for liquid helium consumption.

Specifications

Sample chuck 50x50mm can be probed by 4 DC probes and 2 RF (GSG, up to 40 GHz) probes, or alternately by 2 optical fiber arms with multiple fibers on each arm. There are 6 probe ports. The cryocooler enables a temperature range at the sample of 4.5 - 350 K. There is an option to use a biased (triax) chuck for sample body biasing.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.