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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusWIP - Install
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffFrancis Manfred

Overview

Section

Subsection

Sub-subsection

References

Spare Parts Sourcing

DescriptionVendorPart NumberDatasheetImage
Chamber Lid Closed SwitchDigikeyGH1365-NDhttp://www.grayhill.com/assets/1/7/Push_30.pdf

Pressure ManometerMKS Instruments

122A Abs. Manometer (Current)

622C Abs. Manometer (Recommended Replacement)

https://www.mksinst.com/Docs/R/122A-MAN.pdf

http://www.mksinst.com/docs/UR/622C626C-DS.pdf


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