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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



iLab Name

C - PIE Scientific Tergeo-Plus Plasma System

iLab Kiosk

BRK Etch Core

FIC

Shared

Owner

Francis Manfred

Location

BRK 2100K

Max. Wafer

6" / 150 mm

Info LinksInternal | Staff

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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