Skip to end of banner Go to start of banner

Electron Beam Lithography

Skip to end of metadata

Created by Wirth, Justin C, last modified on Nov 01, 2019

Go to start of metadata

You are viewing an old version of this page. View the current version.

Compare with Current View Page History

Tool Information

Charge Dissipation

References

University of Washington - EBL info

"Fundamentals of Electron Beam Exposure and Development", M. A. Mohammad et al., Nanofabrication (2012).

No labels