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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffFrancis Manfred

Overview

Section

Subsection

Sub-subsection

References

Spare Parts Sourcing

DescriptionVendorPart NumberDatasheetImage
Chamber Lid Closed SwitchDigikeyGH1365-NDhttp://www.grayhill.com/assets/1/7/Push_30.pdf

Pressure ManometerMKS Instruments

122A Abs. Manometer (Current)

622C Abs. Manometer (Recommended Replacement)

https://www.mksinst.com/Docs/R/122A-MAN.pdf

http://www.mksinst.com/docs/UR/622C626C-DS.pdf


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