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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

The Z position of the scanner cannot be recognized by software. A user forgot to close the software before turning off AFM controller.

Estimated Fix Date and Comment

The main issue was resolved. After test run and back up, the toll will be open at 2:30pm 

Responding StaffJoon Park



iLab Name

C - Park NX20 AFM

iLab Kiosk

BRK Metrology Core

FIC

Shared

Owner

Joon Park

Location

Cleanroom - Bay P

Max. Wafer

6"/150mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646

Overview

General Description

This is an example of a tip

This is an example of a tool warning

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         


Questions & Troubleshooting



Process Library

References


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