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2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Cleanroom Probe 1
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm

Overview

General Description

Probe Station III consists of a Micromanipulator 8860 in a dark box on top of a vibration isolation table. The test equipment consists of an Tektronix 4200-SCS Semiconductor Parameter Analyzer similar to those used in probe stations I and II.  Details on the measurement system including measurement examples are available here: https://www.tek.com/product-support?series=Keithley%204200A-SCS%20Parameter%20Analyzer&type=manual

The model 8860 semi-automatic analytical test station provides the base or foundation for quality test results. The 8860’s stage has ±1.5mm repeatability and accuracy with a resolution of 0.1mm for the thin lines and small pads to be probed. User-friendly pcProbe II software with the pcSetup wizard permits complicated test routines to be developed with ease then stored for future tests. Micromanipulator’s H1000 Thermal System provides a single chuck with a temperature range from –65 degrees C to 400 degrees C. Engineered specifically for use in a probe station, the thermal chuck is guarded to protect the station from heat radiated down into the body of the station. The chuck’s plumbing is completely contained within the footprint of the 8860 and the hoses carrying the cooling fluid feature self sealing quick disconnects to prevent fluid leakage.

Specifications


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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