iLab Name: Cleanroom Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm
Overview
General Description
Probe Station II consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. There is a Kiethley SCS4200 Semiconductor Parameter Analyzer for both IV and CV measurements with an embedded PC to collect the data.
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References