Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.
| Status | Down |
| Issue Date and Description | Vacuum Leak & gas control isn't working |
| Estimated Fix Date and Comment | |
| Responding Staff | Francis Manfred |
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Standard Operating Procedure (SOP):
The document below explains how to minimize the reflected power manually when the tool cannot do it automatically.
Overview
Section
Subsection
Sub-subsection
References
Spare Parts Sourcing
| Description | Vendor | Part Number | Datasheet | Image |
|---|---|---|---|---|
| Chamber Lid Closed Switch | Digikey | GH1365-ND | http://www.grayhill.com/assets/1/7/Push_30.pdf |
|
| Pressure Manometer | MKS Instruments | 122A Abs. Manometer (Current) 622C Abs. Manometer (Recommended Replacement) |
|
