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Problem Reporting Guide
Problem Reporting Guide
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StatusUPDOWN
Issue Date and Description

5/20/24 - Laser Alignment Problem

Estimated Fix Date and Comment

5/21/24

Responding StaffHarlan/Park




Page Properties
idInfo


iLab Name
iLab Kiosk
FIC

Shared

Owner
Location

Cleanroom - Bay P

Max. Wafer

6"/150mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646




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Table of Contents
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Overview

General Description

Tip

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Warning

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         

View file
namePark NX20 AFM SOP.pdf
height150


Questions & Troubleshooting



Process Library


References