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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

5/20/24 - Laser Alignment Problem

Estimated Fix Date and Comment

5/21/24

Responding StaffHarlan/Park



iLab Name

C - Park NX20 AFM

iLab Kiosk

BRK Metrology Core

FIC

Shared

Owner

Joon Park

Location

Cleanroom - Bay P

Max. Wafer

6"/150mm

Info Links/wiki/spaces/BNCWiki/pages/6251230| /wiki/spaces/BNCWiki/pages/6248646

Overview

General Description

This is an example of a tip

This is an example of a tool warning

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure

  • SOP ()

         


Questions & Troubleshooting



Process Library

References


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