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BNC Wiki Home
Fabrication
Deposition
PECVD (Plasma Enhanced Chemical Vapor Deposition)
Plasma-Therm Apex SLR HDPCVD Deposition System
Apex HDPCVD Process Data
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Table of Contents
Apex HDPCVD SiO
2
Thickness
Iframe
scrolling
no
src
https://docs.google.com/spreadsheets/d/e/2PACX-1vQs25Qb4EG32oSXq7ZukzrF2GCXX2-wn0WFC9u9DTIc8ozrPZwsdc-tiSduhcYs9rsf3NUKyW2akoqu/pubchart?oid=2143863185&format=interactive
width
100%
frameborder
hide
id
ApexSiO2Thickness
title
Apex SiO2 Thickness
align
left
height
476
Apex HDPCVD SiO
2
RI
Iframe
scrolling
no
src
https://docs.google.com/spreadsheets/d/e/2PACX-1vQs25Qb4EG32oSXq7ZukzrF2GCXX2-wn0WFC9u9DTIc8ozrPZwsdc-tiSduhcYs9rsf3NUKyW2akoqu/pubchart?oid=582040309&format=interactive
width
100%
frameborder
hide
id
ApexSiO2RI
title
Apex HDPCVD Si
align
left
height
472
476
Apex HDPCVD SiN Thickness
Iframe
scrolling
no
src
https://docs.google.com/spreadsheets/d/e/2PACX-1vQs25Qb4EG32oSXq7ZukzrF2GCXX2-wn0WFC9u9DTIc8ozrPZwsdc-tiSduhcYs9rsf3NUKyW2akoqu/pubchart?oid=1313491844&format=interactive
width
100%
frameborder
hide
id
ApexSiNThickness
title
Apex SiN Thickness
align
right
height
472
476
Apex HDPCVD SiN RI
Iframe
scrolling
no
src
https://docs.google.com/spreadsheets/d/e/2PACX-1vQs25Qb4EG32oSXq7ZukzrF2GCXX2-wn0WFC9u9DTIc8ozrPZwsdc-tiSduhcYs9rsf3NUKyW2akoqu/pubchart?oid=490280215&format=interactive
width
100%
frameborder
hide
id
ApexSiNRI
title
Apex SiN RI
align
right
height
472
476
General
Content
Integrations
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