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Plasma-Therm Apex SLR HDPCVD Deposition System
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Apex HDPCVD Process Data
Apex HDPCVD Process Data
Hosler, Richard S
Owned by
Hosler, Richard S
Last updated:
May 28, 2024
1 min read
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1
Apex HDPCVD SiO
2
Thickness
2
Apex HDPCVD SiO
2
RI
3
Apex HDPCVD SiN Thickness
4
Apex HDPCVD SiN RI
Apex HDPCVD SiO
2
Thickness
Apex HDPCVD SiO
2
RI
Apex HDPCVD SiN Thickness
Apex HDPCVD SiN RI
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