Protemp Horizontal Furnace - Tube 04 - Field Oxide Growth

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

This tube has a damaged from heating zone. Tests were performed to determine if this is causing lower rates. (oct_23_ox_check.xlsx) 

Dry oxide rate was determined to be 7% lower than target on the default 200nm recipe.

Wet oxide rate was determined to be 36% lower than target on the default 1000nm recipe.

The tube is still functional and usable, just bear the above in mind with recipe lengths.

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

• Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

• Tube 04 - 1100°C maximum

Standard Operating Procedure