Protemp Horizontal Furnaces

Protemp Horizontal Furnaces



iLab Kiosk: BRK Furnace Core
FIC:
 Shared
Owner: Rich Hosler
Location:
Cleanroom - R Bay
Maximum Wafer Size: 
6"/150 mm (for all furnaces)

Overview

General Description

Horizontal furnaces for a variety of processes.

Tube#Tube NameMax TempProcess Capabilities
Tube 1RCA Clean Oxidation

1100°C

Wet / Dry Oxidation (Super-Clean SI users only)
Tube 2Nitride Deposition

800°C

LPCVD Nitride Deposition

Tube 3

LTO Deposition400°CLow Temperature Oxidation Deposition
Tube 4Field Oxide Growth1100°CWest / Dry Oxidation (General Use)
Tube 5Anneal1100°CAnneal
Tube 6Polysilicon Deposition650°CPolysilicon
Tube 7General Oxidation1100°CWet / Dry Oxidation (III/V Materials)
Tube 8Phosphorus Drive1100°CPhosphorous Deposition
Tube 9TEOS Deposition800°CTEOS

Standard Operating Procedure

Protemp furnace SOP - Released 3/10/2021

Training Videos:

 - Thermal Oxidation

      - CVD