Status	DOWN
Issue Date and Description	Decommissioning
Estimated Fix Date and Comment	ETA August 2025 - installing replacement Expertech furnace
Responding Staff	R. Hosler

THIS TUBE IS CURRENTLY NOT IN OPERATION WHILE THE EXPERTECH FURNACES THAT WILL REPLACE THEM ARE BEING INSTALLED.

ESTIMATED INSTALLATION READYNESS IS AUGUST 2025.

Protemp Horizontal Furnace - Tube 04 - Field Oxide Growth

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

This tube has a damaged from heating zone. Tests were performed to determine if this is causing lower rates. (oct_23_ox_check.xlsx)

Dry oxide rate was determined to be 7% lower than target on the default 200nm recipe.

Wet oxide rate was determined to be 36% lower than target on the default 1000nm recipe.

The tube is still functional and usable, just bear the above in mind with recipe lengths.

Overview

General Description

Horizontal furnaces for a variety of processes.

Process Capabilities:

Process Temperatures:

- Thermal Oxidation