Tube 04 Field Ox

Owned by Wirth, Justin C
Last updated: Nov 13, 2024 by Hosler, Richard S
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusMAINT
Issue Date and Description

12am

Estimated Fix Date and Comment

10am  - Cleanroom maintenance next to furnace

Responding StaffR. Hosler

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Protemp Horizontal Furnace - Tube 04 - Field Oxide Growth

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

This tube has a damaged from heating zone. Tests were performed to determine if this is causing lower rates. (oct_23_ox_check.xlsx) 

Dry oxide rate was determined to be 7% lower than target on the default 200nm recipe.

Wet oxide rate was determined to be 36% lower than target on the default 1000nm recipe.

The tube is still functional and usable, just bear the above in mind with recipe lengths.

Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

  • Tube 04 - 1100°C maximum


Standard Operating Procedure

 - Thermal Oxidation