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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
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Please see PI for sample approval. |
iLab Name: Easy Tube 3000 CVD
iLab Kiosk: BRK Growth Core
FIC: Chen Yang
Owner: Joon Park
Location: BRK 2221
Maximum Wafer Size: 2"/50 mm
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Overview
General Description
Graphene thermal and plasma deposition system.
Specifications
Please see PI for sample approval.
Technology Overview
Si, Cu
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References