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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.

Status

UP

Issue


Estimated Resolution Timeframe


Please see PI for sample approval.


iLab Name: Easy Tube 3000 CVD
iLab Kiosk: BRK Growth Core
FIC: Chen Yang
Owner: Joon Park
Location: BRK 2221
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Graphene thermal and plasma deposition system.

Specifications

Please see PI for sample approval.

Technology Overview 

Si, Cu


Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References

 

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