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Equipment Status:Set as UP, PROBLEM, or DOWN. See Problem Reporting Guide for more info.
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iLab Name: Kratos AXIS Ultra DLD Imaging X-ray Photoelectron Spectrometer (XPS)
iLab Kiosk: BRK Metrology Core
Owner: Dmitry Zemlyanov
Location: BRK 1077
Maximum Wafer Size:
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Overview
General Description
Imaging X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate with a lateral resolution of 5 μm. The technique can analyze any vacuum-compatible substrate. The AXIS ULTRA DLD incorporates quantitative, real-time parallel XPS imaging with high spatial resolution spectroscopy.
Specifications
The technique can analyze any vacuum-compatible substrate.
- A Kratos charge neutralization system allows to work with non-conducting samples.
- Magnetic immersion lens for efficient photoelectron collection.
- Spherical mirror analyzers for high resolution (over spectrometer-sample resolution is <0.35 eV).
- Monochromized Al and Ag anodes minimize a sample radioactive damage.
- Concentric hemispherical analyzers combined with a DLD detector for real time XPS imaging.
- Fast load lock with cryo/heating options, which can used for biological and organic samples.
- A catalytic cell to facilitate substrate treatment and preparation (6 bar, 1000).
- A glove box attached directly to the instrument to load/prepare a moisture– or air–sensitive samples.
- A corronene gun for non-destructive depth profiling.
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References