Versions Compared

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff




iLab Name: Probe 2
iLab Kiosk:
FIC:
Shared
Owner: Nithin Raghunathan

Location:
 2100- J (J-bay)
Maximum Wafer Size: 
4"/100 mm


Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview

General Description

Probe Station I consists of a Micromanipulator 6000 probe station in a dark box on top of a vibration isolation table. Like a ll Similar to semiconductor probe stations, theutilised for this is utilized for the electrical testing  testing of microfabricated devices.  There is a Kiethley SCS4200 Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements with an embedded PC to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References