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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Micromanipulator 6000 probe station in a dark box on top of a vibration isolation table. Similar to semiconductor probe stations, this is utilized for the electrical testing of microfabricated devices.  There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 


References

 

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