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iLab Name: Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm
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Overview
General Description
An Everbeing EB-6 high precision probe station is available for DC wafer probing.
Features
- Low profile coaxial-driven style stage (optional large knob precision stage)
- Back-lash free movement
- Mounting for 12 micropositioners
- 4.5” Probe Card Holder compatible
- Micropositioner Standby Dock
- Microscope Tilting for E-Z lens switching
Applications
Basic IV/CV
RF, Single Broadband Probing
High Voltage, High Current
Probe Station I consists of a Micromanipulator 6000 probe station in a dark box on top of a vibration isolation table. Similar to semiconductor probe stations, this is utilized for the electrical testing of microfabricated devices. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1