iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm

Wet Oxidation will be down from 12/18/2020 to 1/4/2021 for winter shutdown due to H2 content. Dry oxidation is fine.

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

• Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

• Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview 

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References