Tube 01 Clean Ox
Status | DOWN |
Issue Date and Description | Decomissioning |
Estimated Fix Date and Comment | ETA October 2025 - installing replacement Expertech furnace |
Responding Staff | R. Hosler |
Protemp Horizontal Furnace - Tube 01 - RCA Clean Oxidation
iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm
THIS TUBE IS CURRENTLY NOT IN OPERATION WHILE THE EXPERTECH FURNACES THAT WILL REPLACE THEM ARE BEING INSTALLED.
ESTIMATED INSTALLATION READYNESS IS OCTOBER 2025.
Overview
General Description
Horizontal furnaces for a variety of processes.
Specifications
Process Capabilities:
Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)
Process Temperatures:
Tube 01 - 1100°C maximum
All furnace tubes are capable of samples up to 6 inches in diameter.
Standard Operating Procedure
- Thermal Oxidation