iLab Name: N/A
iLab Kiosk: N/A
FIC: Peter Bermel
Owner: Neil Dilley
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm

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Overview

General Description

Consists of a P200L semi-automatic wafer mapping probe station (upgraded from a Micromanipulator 8860 in 2017) in a dark box on top of a vibration isolation table. The test equipment consists of an Keithley 4200-SCS Semiconductor Parameter Analyzer similar to those used in probe stations I and II.  Details on the measurement system including measurement examples are available here: https://www.tek.com/product-support?series=Keithley%204200A-SCS%20Parameter%20Analyzer&type=manual

The model 8860 semi-automatic analytical test station provides the base or foundation for quality test results. The 8860’s stage has ±1.5mm repeatability and accuracy with a resolution of 0.1mm for the thin lines and small pads to be probed. User-friendly pcProbe II software with the pcSetup wizard permits complicated test routines to be developed with ease then stored for future tests. Micromanipulator’s H1000 Thermal System provides a single chuck with a temperature range from –65 degrees C to 400 degrees C. Engineered specifically for use in a probe station, the thermal chuck is guarded to protect the station from heat radiated down into the body of the station. The chuck’s plumbing is completely contained within the footprint of the 8860 and the hoses carrying the cooling fluid feature self sealing quick disconnects to prevent fluid leakage.

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Designed for low current, sub-micron positioning applications, the Micromanipulator P200L comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew - leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

Specifications

• 200mm semiautomatic wafer prober
  • Stage 200 x 200mm (X-Y), x 25mm (Z - platen) drive range:  Supports wafers / samples up to 200mm
  • Stage resolution 0.5 micron, accuracy +/- 5 um, repeatability +/- 2 um. Supports probing of the smallest targets.
• NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
• Integrated digital microscope with optical and thermal IR detection.
• Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
• Configurable for DC, RF, Microwave, and High Power applications
• -65C to 400C configurable

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References