iLab Name: N/A
iLab Kiosk: N/A
FIC: Peter Bermel
Owner: Neil Dilley
Location: Cleanroom - J Bay
Maximum Wafer Size: 8"/200 mm
Overview
General Description
Consists of a P200L semi-automatic wafer mapping probe station (upgraded from a Micromanipulator 8860 in 2017) in a dark box on top of a bench.
Designed for low current, sub-micron positioning applications, the Micromanipulator P200L comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew - leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.
Specifications
- 200mm semiautomatic wafer prober
- Stage 200 x 200mm (X-Y), x 25mm (Z - platen) drive range: Supports wafers / samples up to 200mm
- Stage resolution 0.5 micron, accuracy +/- 5 um, repeatability +/- 2 um. Supports probing of the smallest targets.
- NETPROBE-7 control software with wafer map, integrated video, theta alignment, sub-die, and pattern recognition
- Integrated digital microscope with optical and thermal IR detection.
- Drivers available for popular testers companies including Keysight, Keithley, and LabVIEW
- Configurable for DC, RF, Microwave, and High Power applications
- -65C to 400C configurable
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library