iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Wet Oxidation will be down from 12/18/2020 to 1/4/2021 for winter shutdown due to H2 content. Dry oxidation is fine.

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

• Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

• Tube 04 - 1100°C maximum

Technology Overview 

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References