Versions Compared

Old Version 25

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version 26

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue

StatusUPDOWN
Issue Date and Description

  Front zone low temperature

Estimated Fix Date and Comment

Cooling furnace, will investigate cause tuesday.

Responding StaffR. Hosler


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)



Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

  • Tube 04 - 1100°C maximum

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure

Widget Connector
urlhttp://youtube.com/watch?v=cvJ9GNvxZF4
 - Thermal Oxidation


Questions & Troubleshooting



Process Library

References