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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description

  Front zone low temperature

Estimated Fix Date and Comment

Cooling furnace, will investigate cause tuesday Front zone coil broken. Planning spare replacement now.

Responding StaffR. Hosler


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)



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Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

  • Tube 04 - 1100°C maximum

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure

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urlhttp://youtube.com/watch?v=cvJ9GNvxZF4
 - Thermal Oxidation


Questions & Troubleshooting



Process Library

References