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changes.mady.by.user Wirth, Justin C

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Problem Reporting Guide
Problem Reporting Guide
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Status
UP
MAINT
Issue
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Date and Description

 

Estimated Fix Date and Comment
 10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Protemp Horizontal Furnace - Tube 05 - Anneal

iLab Name: C - Tube 05 Anneal
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

*** Forming gas in this tool is 4% H2 and balance Ar instead of the usual N2 ***

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Overview

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General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 05 - Anneal

Process Temperatures:

  • Tube 05 - 1100°C maximum

Technology Overview 

 

Sample Requirements and Preparation

 

Standard Operating Procedure

Questions & Troubleshooting

 

Process Library

References