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Tube 05 Anneal

Tube 05 Anneal

Owned by Wirth, Justin C
Last updated: Jun 20, 2025 by Ethan Zhang



Status

DOWN

Issue Date and Description

Decomissioning

Estimated Fix Date and Comment

ETA August 2025 - installing replacement Expertech furnace

Responding Staff

R. Hosler



THIS TUBE IS CURRENTLY NOT IN OPERATION WHILE THE EXPERTECH FURNACES THAT WILL REPLACE THEM ARE BEING INSTALLED. 

ESTIMATED INSTALLATION READYNESS IS AUGUST 2025.

Protemp Horizontal Furnace - Tube 05 - Anneal

iLab Name: C - Tube 05 Anneal
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

*** Forming gas in this tool is 4% H2 and balance Ar instead of the usual N2 ***



Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 05 - Anneal

Process Temperatures:

  • Tube 05 - 1100°C maximum