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Problem Reporting Guide
Problem Reporting Guide
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Status
UP
MAINT
Issue

This tube will be unavailable from 12/22/2018 to 1/2/2019 due to unavailability of TGMS on Silane over recess.

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Date and Description

 

Estimated Fix Date and Comment 10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Protemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


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Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum

Technology Overview 

 

Sample Requirements and Preparation

 


Standard Operating Procedure

Questions & Troubleshooting

Widget Connector

 

Process Library

References

 

urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD