Tube 06 Polysilicon

Owned by Wirth, Justin C
Last updated: May 02, 2024 by Hosler, Richard S
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment
Responding StaffNew tank 3/2024

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Protemp Process Data

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Protemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum


Standard Operating Procedure

 - CVD