Tube 06 Polysilicon

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusMAINT
Issue Date and Description

 

Estimated Fix Date and Comment 10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


Protemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC:
 Shared
Owner: Rich Hosler
Location:
Cleanroom - R Bay
Maximum Wafer Size: 
6"/150 mm (for all furnaces)

Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum


Standard Operating Procedure

 - CVD