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Overview
General Description
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Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Specifications
- Scanner
- Z scanner (AFM Head): Flexure guided high-force scanner, Scan range: 15um / Typical sample height to measure: <1um
- XY scanner: Dual-servo closed-loop feedback control for precise XY positioning, Scan range: 100um x 100um / If you would like to scan more than 50um far from the initial engage point, the scanner should be redraw and engage again.
- Stage
- XY stage travel range: 200mm
- Z stage travel range: 25mm
- Focus stage travel range: 8mm
- Vision
- Field of view: 840um x 630um
- 10 x ultra-long working distance lens
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
- SOP ()
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- Clip Type Chip Carrier Guide
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Questions & Troubleshooting
Process Library