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Problem Reporting Guide
Problem Reporting Guide
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StatusUPMAINT
Issue Date and Description

No wet oxidation (TGMS - Hydrogen) 12am

Estimated Fix Date and Comment

10am  - Cleanroom maintenance next to furnace

Responding StaffR. Hosler


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Image RemovedProtemp Horizontal Furnace - Tube 04 - Field Oxide Growth

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

This tube has a damaged from heating zone. Tests were performed to determine if this is causing lower rates. (oct_23_ox_check.xlsx) 

Dry oxide rate was determined to be 7% lower than target on the default 200nm recipe.

Wet oxide rate was determined to be 36% lower than target on the default 1000nm recipe.

The tube is still functional and usable, just bear the above in mind with recipe lengths.


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Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

  • Tube 04 - 1100°C maximum

Technology Overview 

Sample Requirements and Preparation


Standard Operating Procedure

Process Library

References

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Questions & Troubleshooting

urlhttp://youtube.com/watch?v=cvJ9GNvxZF4
 - Thermal Oxidation